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Ambient Temperature · RS65.Lab.O / .R Piezo-Linear Stage

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Piezoelectric · Linear Motion— RS65.Lab.O / .R (closed-loop)
Piezoelectric motion@RT solutions — “.Lab Series“ Well packaged piezoelectric motion unit
Piezo-Linear Stage with compact shape and no compromise on power
performance; while guaranteeing a premium price space.
2D - Dimensional drawing
RS65.Lab.O /.R Piezo-Linear Stage — Specification

Optional Versions ⇨

Default

.NM

.HV

.UHV

 

 

.NM,  Absolutely non-magnetic version;

.HV,   High vacuum version;

.UHV, Ultra high vacuum version;

1         Bottom size*height

65 × 65 mm × 12 mm

2         Main Material

Stainless Steel

Pure Ti

Stainless Steel

Stainless Steel

3         Cables & Connectors

Standard shielded cable

D-Sub 9 Connector

Kapton enameled Wire,

PEEK-2mm Pin

Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form)

4         Travel

Continuous

5         MAX. Velocity

~ 15 °/s

6         Min. Step

3 urad

7         Drive Frequency

Max. 20 kHz (Super quiet movement)

8         Maximum load

0.1 kg

9         Self-locking force

10 N*mm

10        Driving torque

7 N*mm

11        Rotating disk

dia-50 mm

Sensing accuracy

12        Position Sensing Type

- Resistance type sensing ( .R )

- Optical scale sensing ( .O )

13        Position sensing range

0.75 urad

14        Position sensing resolution

- Resistance type sensing ( .R ), 100-200 nm

- Optical scale sensing ( .O ), 10 nm ( default ),1nm ( option )