Ambient Temperature · Carrier.L7550.XY Large-range piezoelectric scanning table

Details

Piezoelectric · Large Travel Linear Motion— Carrier.L7550.XY

Piezoelectric motion@RT solutions — “.Carrier Series“ Large Travel Carrier - Precision Optics, Semiconductor Characterization

Piezo-Linear Stage with compact shape and no compromise on power

performance; while guaranteeing a premium price space.

Product Features

• XY-directional range 75 mm × 50 mm

• Smallest size of about 20 nm

• Maximum velocity 20 mm/s

• Closed-loop sensing with 100 nm / 10 nm spatial resolution

• Guaranteed through-hole of 85 mm × 65 mm for full range of motion

• Supports no magnetism (.NM) & ultra-high vacuum (.UHV)

• Main body aluminum alloy (hard oxide blackened)

2D - Dimensional drawing

Carrier.L7550.XY Large-range piezoelectric scanning table —Specification

Optional Versions ⇨	Default	.NM	.HV	.UHV
	.NM version, non-magnetic; .HV version, high vacuum; .UHV version, compatible with 2E-11 mbar
Orientation of 1 movement	X，Y
2 Bottom size * height	250 mm × 200 mm × 30 mm
Required installation 3 space	325 mm × 250 mm
4 Effective perforation	85 mm × 65 mm
5 Main Material	Aluminum alloy
6 Cables & Connectors	Standard shielded cable D-Sub 9 Connector		Kapton enameled Wire， PEEK-2mm Pin
7 Operating temperature	10 – 40 °C
Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form)
8 Travel	75 mm × 50 mm
9 MAX. Velocity	~ 20 mm/s
10 Min. Step	～ 30 nm
11 Drive Frequency	Max. 20 kHz （Super quiet movement）
12 Maximum load	2 kg
13 Full-travel pitch/yaw	0.8 mrad
传感精度
14 Position Sensing Type	- Resistance type sensing ( .R ) - Optical scale sensing ( .O )
15 Position sensing range	75 mm × 50 mm
16 Position sensing resolution	- Resistance type sensing ( .R ), 100-200 nm - Optical scale sensing ( .O ), 10 nm ( default )，1nm ( option )