Optional Versions ⇨ |
Default |
.NM |
.HV |
.UHV |
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.NM, Absolutely non-magnetic version; .HV, High vacuum version; .UHV, Ultra high vacuum version; |
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1 Bottom size*height |
35 × 35 mm × 32 mm |
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2 Operating temperature |
Default maximum temperature 40 ℃, ultra-high vacuum option supports 120 ℃ |
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3 Main Material |
Stainless Steel |
Pure Ti |
Stainless Steel |
Stainless Steel |
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4 Cables & Connectors |
Standard shielded cable D-Sub 9 Connector |
Kapton enameled Wire, PEEK-2mm Pin |
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Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form) |
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5 Travel |
10 mm |
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6 MAX. Velocity |
~ 10 mm/s |
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7 Min. Step |
< 10 nm |
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8 Drive Frequency |
Max. 20 kHz (Super quiet movement) |
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Maximum horizontal 9 force |
1 kg |
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10 Full-travel pitch |
0.3 mrad |
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11 Full-travel yaw |
0.2 mrad |
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Sensing accuracy |
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12 Position Sensing Type |
- Resistance type sensing ( .R ) - Optical scale sensing ( .O ) |
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13 Position sensing range |
20 mm |
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14 Position sensing resolution |
- Resistance type sensing ( .R ), 100-200 nm - Optical scale sensing ( .O ), 10 nm ( default ),1nm ( option ) |