Low Temperature · Piezoelectric Scanner16-xy Motion Stage

Details

“16 mm Series” — Scanner16-xy (closed-loop)

Low Temperature · Piezoelectric Motion- Scanner Series

Smallest scanner stage with closed-loop control

Features

• Compact design, dimensions: 16*16*9 mm

• Ultra-high vacuum & very low temperature compatible: 2 E-11 mbar & 30 mK

• Non-magnetic material Composed of pure Ti & BeCu, compatible with the 18 Tesla magnetic field

• High loads: 100 g

• Long travel range @300 K: 30*30 um

• Closed-loop control with position sensing up to 0.3 nm resolution

Dimension drawing

Scanner16-xy, Specification

*All data below is measured with 50 ohm wires. Though there is no requirement on wires’ conductance, we recommend resistance below 50 ohm.

Optional Versions ⇨	.HV (default)	.ULT	.UHV	.ULT.UHV
	.HV version, default product; .ULT version, used at He3 or dilution cryogenics systems .UHV version, compatible with 2E-11 mbar
1 Footprint × hight	16 × 16 mm × 9 mm
2 Weight	8 g
Working Environment &
3 Work environment	Temperature range: 1.4 ~ 400 K Vacuum: 2e-7 mbar Max. Magnetic field: 18 Tesla
4 Option1 - 30 mK		✓		✓
5 Option2 - 2e-11 mbar			✓	✓
Materials
7 Mainbody	Pure Ti	BeCu	Pure Ti	BeCu
8 Wires	Phosphor Bronze Twisted Paired Wires, 20cm
9 Pin materials	Polyster (glass fiber filled), BeCu		Peek, BeCu
10 Pins number	2 pins for each axis
Motion
11 Scanning Axies	X, Y
12 Travel range @300 K	30 × 30 um
13 Drive voltage	Max. 120 V @300 K Max. 200 V @4 K
14 Max. Load	100 g
15 Capacitance @300 K	0.1 uF
Sensor (closed loop)
17 Sensor resolution	0.3 nm
18 Linearity error	Typical ~ 0.1 %
19 Repeatability	< 10 nm