Low Temperature · Piezoelectric Linear 35-x-Slim Series Motion Stage

Details

Low Temperature · Piezoelectric Linear 35-x-Slim Series Motion Stage

“35mm Series” — Linear35-x-Slim (closed-loop)

Low Temperature · Piezoelectric Motion- Linear Series High-load linear stage with closed-loop control

Features

• Compact design, dimensions: 35*35*10.5 mm

• Ultra-high vacuum & very low temperature compatible: 2 E-11 mbar & 30 mK

• Non-magnetic material Composed of pure Ti & BeCu, compatible with the 18 Tesla magnetic field

• High loads & high thrusts: 2500 g & 3 N

• Long travel range: 20 mm

• Closed-loop control with position sensing up to 0.1 um resolution

Dimension drawing

Linear35-x-Slim, Specification

*All data below is measured with 50 ohm wires. Though there is no requirement on wires’ conductance, we recommend resistance below 50 ohm.

	Optional Versions ⇨	.HV (default)	.ULT	.UHV	.ULT.UHV
		.HV version, default product; .ULT version, used at He3 or dilution cryogenics systems .UHV version, compatible with 2E-11 mbar
1 Footprint × hight		35 × 35 mm × 10.5 mm
2 Weight		38 g
Working Environment &
3 Work environment		Temperature range: 1.4 ~ 400 K Vacuum: 2e-7 mbar Max. Magnetic field: 18 Tesla
4 Option1 - 30 mK			✓		✓
5 Option2 - 2e-11 mbar				✓	✓
Materials
7 Mainbody		Pure Ti	BeCu	Pure Ti	BeCu
8 Wires		Phosphor Bronze Twisted Paired Wires, 20cm
9 Pin materials		Polyster (glass fiber filled), BeCu		Peek, BeCu
10 Pins number		Drive - 2 pins, Sensor - 3 pins
Motion
11 Travel range		20 mm
12 Max. Velocity @300 K		~ 2 mm/s
13 Drive voltage		Max. 200 V
14 Max. Load		2500 g
15 Dynamic force		3 N
Sensor (closed loop)
16 Position encoder		Resistive Sensor
17 Encoder range		20 mm
18 Sensor resolution		~ 150 nm
19 Repeatibility		1 - 2 um