Model |
UFP1A |
UFP1B |
UFP1C-L |
UFP1C-R |
UFP2T-L |
UFP2T-R |
Table Size(mm) |
60×60 |
45×45 |
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Table Thickness(mm) |
20 |
25 |
30 |
- |
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Travel |
coarse adjustment:±6.5mm;fine adjustment:±0.3mm |
θx:±3°;θy:±3° |
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Bearings |
Linear slide guide |
Crossed-Roller Bearings |
Crossed-Roller Ring |
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Actuators |
micrometer |
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Weight(Kg) |
0.28 |
0.32 |
0.4 |
0.64 |
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Sensitivity |
coarse adjustment:≤10µm;fine adjustment≤0.5µm |
θx:≤25.2″;θy:≤23.4″ |
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Static parallelism |
≤60µm |
- |
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Motion parallelism |
≤10µm |
- |
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Motion straightness |
≤3µm |
- |
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Load(Kg) |
5 |
5 |
5 |
1.5 |